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Calibrating MEMS DC Accelerometers

On-Site Testing for High Sensitivity MEMS Accelerometers

High sensitivity MEMS-based accelerometers (known by a host of names, such as variable capacitance, DC response, DC MEMS, piezoresistive, or piezoresistive MEMS accelerometers) test low amplitude vibration levels, providing high voltage output. These accelerometers are calibrated for frequency response by manufacturers. A Portable Vibration Calibrator allows the same calibrations to be performed at the test site.

How to Calibrate MEMS DC Accelerometers

Watch and learn how to calibrate a MEMS Acceleration sensor using a Low Frequency Portable Vibration Calibrator Model 9210D. The Model 9210D can be brought to the test site to confirm the entire measurement chain (including the MEMS DC high sensitivity sensor, cable, and data acquisition system) is operating correctly at critical frequencies.

Common MEMS DC Accelerometer Applications

MEMS DC accelerometers are often used when there is a need for low frequency vibration testing or constant or low frequency acceleration measurements.

  • Airbag and crash testing
  • Seismic monitoring
  • Tilt measurement
  • Flight testing, including in-flight vibration testing
  • Aircraft / airframe vibration measurement
  • Aircraft flutter and buffeting testing
  • Landing gear qualification testing
  • Bridge testing
  • Astronaut seat testing
  • Aerospace structural analysis
  • Vehicular ride simulation, drivability, and ride quality studies
  • Elevator testing and control
  • Characterization of low frequency damping in braking, steering, and suspension system testing

Low Frequency Portable Vibration Calibrator Model 9210D

  • Model 9210D has the best accuracy of any Portable Vibration Calibrator on the market today (validated by an A2LA-credited calibration process). From 2 Hz to 2 kHz Model 9210D is accurate to ± 3%, and from 0.7 Hz to less than 2 Hz, the accuracy is ± 10%
  • The internal shaker of the Model 9210D has been calibrated against a laser-primary calibration system and can easily be checked for accuracy in the field
  • See more information on the Low Frequency Portable Vibration Calibrator Model 9210D

What Types of DC MEMS Response Accelerometers can be calibrated with a Low Frequency Portable Vibration Calibrator?

The Modal Shop’s Low Frequency Portable Vibration Calibrator Model 9210D can calibrate piezoresistive DC response accelerometers including the following models:

  • PCB Piezotronics: 3711B, 3711D, 3711F, 3741B, 3741E, and 3741F Series General-Purpose MEMS DC accelerometers (single axis); 3713B, 3713C, 3713D, 3713E, 3713F Series General-Purpose MEMS DC Accelerometers (triaxial)
  • Dytran Series 7509 DC Response Sensors
  • Endevco 7290A, 7290D, and 7290G Variable Capacitance Accelerometers
  • Meggitt Endevco 770A and 770F lightweight variable capacitance low g DC accelerometers
  • Kistler 8316A Capacitive Accelerometer Family for Low Frequency Applications (single axis)
  • Kistler 8396A MEMS Capacitive Low Frequency Accelerometer Family (triaxial)

Other Calibration System Considerations

The Modal Shop also offers an Accelerometer Calibration Workstation Model 9155D, a laboratory grade system that supports an extended displacement shaker. This fully automated system offers high precision and fast calibration at low frequencies with low uncertainty and includes databasing software.